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Lithography |
- Micro and nanopatterning with electron beam lithography for research & development and small batch production.
- Front-end and back-end wafer as well as IC inspection in the semiconductor industry
- Lithography solutions for manufacturing and replication of advanced micro- and nano- scale structures.
- Definition of planar geometries and for surface diagnostics, in applications where maximum resolutions down to 0.7 µm are required by transforms a laser beam into a controlled writing tool for photolithographic mask fabrication or for direct in situ processing on planar substrates.
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| | | | | Micro and nanopatterning with electron beam lithography for research & development and small batch production | |  |
| | | | | | An Ion Beam Lithography system for nanofabrication and nanoengineering, for low dose applications in surface science, thin film engineering and applied physics research.
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| | | | | | The LaserWriter system is designed for the definition of planar geometries and for surface diagnostics, in applications where maximum resolutions down to 0.7 µm are required.
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