The Q150T Plus is optimised for use with a turbomolecular pump, which gives a lower vacuum down to 5 x 10-5 mbar. This enables the sputtering of oxidising metals, which have a lower grain size suitable for high-resolution imaging.
Q150T S Plus – an automatic sputter coater for non-oxidising metals. Sputtering targets include; Cr, Ir, W, ITO, Al
Q150T ES Plus – a combined system system capable of both sputtering and carbon coating. The deposition heads can be swapped in seconds.