Q 150 TS / TES Plus 
The Q150T Plus is optimised for use with a turbomolecular pump, which gives a lower vacuum down to 5 x 10-5 mbar. This enables the sputtering of oxidising metals, which have a lower grain size suitable for high-resolution imaging.

Q150T S Plus –  an automatic sputter coater for non-oxidising metals. Sputtering targets include; Cr, Ir, W, ITO, Al  

Q150T ES Plus –  a combined system system capable of both sputtering and carbon coating. The deposition heads can be swapped in seconds.

Your Needs