Park NX-Hivac
High vacuum atomic force microscope for failure analysis and ​atmosphere-sensitive materials research
Park NX-Hivac allows failure analysis engineers to improve the sensitivity and repeatability​ of their ​AFM ​measurements through high vacuum ​environment. Because high vacuum ​measurement offers greater accuracy, better repeatability, and less tip and sample damage than ambient or dry
N2 conditions, users can measure a wide​r​ range of signal response​ in various failure analysis applications​​, such as dopant concentration of Scanning Spreading Resistance Microscopy (SSRM).

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