MicroXAM-800 Optical Profiler
The MicroXAM-800 is a white light interferometer-based optical profiler that measures nanometer-level features with phase scanning interferometry (PSI), and sub-micron to millimeter features with vertical scanning interferometry (VSI). With simple, flexible recipe setup for single scans or automated measurements on multiple sites, the MicroXAM-800 supports both R&D and production environments.

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