The Model BDF-41 four stack diffusion
furnace system is designed to accept
process wafers up to and including 200mm
in diameter.
The standard BTI convention for a right
handed furnace is when viewing the furnace
from the operator’s side, the load station is
to the right and the source cabinet is to the
left. Tube level one (1) is the uppermost tube and tube level four (4) is the lowest.
BTI Standard Colors are standard light gray and charcoal gray. Refurbished equipment color will be as received.
Installation, operation and maintenance instructions on clean room paper are provided upon shipment.
