Closed Coupled Showerhead® Flip Top Reactor
Deposition system for compound semiconductors

Proven Close Coupled Showerhead®
  • True scaling from R&D to mass production
  • Inherently uniform and reproducible growth for all material systems
  • High flexibility in process window for excellent material quality and uniformity
Ideal for small R&D budgets: lowest running cost
  • Low gas flows and high precursor efficiency
  • Easy and low cost maintenance

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