The “Nanofinger®” sensor is a small MEMS device that detects the distance between a probe tip and a sample. The Nanofinger® sensor is driven by a special high speed electronics that reacts with a bandwidth of several KHz. The Nanofinger® sensor is moved towards a sample in closed loop with 1 nm increments until it reaches the desired signal value (e.g. at 75% amplitude). At this moment the position of the stage that moves this sensor is stored as coordinate data. The Nanofinger® sensor s removed again and then moved aside for the next approach, at any time in closed loop with 1 nm increments.