Corial 200FA RIE Etch system for failure analysis applications
The Corial 200FA combines the advantages of high rates with low cost of ownership for IC failure analysis applications.

This equipment is installed in major fabs worldwide and features simple, direct loading of packaged dies, and dies up to 10x10 mm.

The Corial 200FA RIE plasma etcher uses an ultra-high-density plasma source and is designed for etching polymers and dielectrics.

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