MicroXAM - 100 3D Surface Profilometer
The KLA-Tencor Development Series of 3D surface profilers offer a complete optical surface profilometer and optical interferometer solution focusing on the needs of the engineering and research community. Our 3D surface profiler and optical interferometer products are designed to match the varied requirements of our customers through the delivery of full featured 3D surface profiler and optical interferometer products, integration of new technologies, and improved performance.

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