Candela CS920
The Candela CS920 SiC substrate and epitaxy (epi) wafer surface defect inspection system is designed for power device manufacturers to provide full-surface, high-sensitivity defect inspection and accurate process feedback. This epi wafer surface defect detection system enables the industry to improve SiC substrate quality as well as optimize the epitaxial growth yields for both SiC epi and GaN-on-silicon processes.

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