AIX R6 Metal Organic Chemical Vapor Deposition
Applying this technology, the process gases are introduced vertically over the entire coating surface in the reactor via the water-cooled showerhead surface. The gas flow into the reactor is designed in such a manner that the Group III and Group V gases are separated until they enter the reactor (by many small narrow tubes at the showerhead inlet). This technology ensures an unmatched level of reproducibility.

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